Elettrolinux

Regress Pro is a scientific and industrial software that can be used to study experimental data: the application lets you load spectroscopic data coming from an ellipsometer or reflectometer and analyze them using well-proven algorithms to determine various physical parameters like film's thickness or refractive index. Regress Pro lets you define a model of the film stack using a simple declarative language. You can also define a fit algorithm to analyze the data or, in alternative, perform an interactive fit of the data. Several models are available to define the dispersion curves of the materials and in addition some of the most common materials are provided in the library. The program has been developed mainly looking to the application of thin film measurement in semiconductor industry. The software is suitable both to determine the thickness of the layers and to determine the optical properties of dielectric materials. You will be also able to define a fit strategy well suited to the problem under analysis. With Regress Pro you will be able to determine the optical properties of unknown materials or, if you already know the materials, you can run simple fits to determine the thicknesses of the involved layers. To characterize the optical properties of the materials Regress Pro offers different optical models:

• Cauchy model;
• Harmonic Oscillators model;
• Lookup model.

Dispersion models are useful to describe the refractive index and the absorption coefficient of a material as a function of the wavelength. Each kind of dispersion model can have different parameters that determines the behaviour of the refractive index with the wavelength. When performing a fit of the experimental data the parameters of the dispersion model can be kept fixed or they can be given to the fit procedure to find the values of best fit. If you want to try it and/or for more information, click here. Note: If you use the binary version of Regress Pro starting from release 1.4 you should register the software for continued use. Regress Pro is published under the GNU GPL license and as such it is free software. This means that the source code is freely available and you have the right to study, modify and distribute the code as long as you respect the terms of the GNU GPL license. The registration is not meant as a restriction over the software itself, this latter is available without restriction accordingly to the GNU GPL license. The registration is meant for the optimized binary package produced by the author itself and proposed to the users. It should be seen as a facility to avoid the difficulties of the software compilation and the user should consider to register the software to contribute to the development of the project and to reward the author for his work.